Model No: Stage 3 X3/Y3 Claw Rotor Set

Stage 3 X/Y Claw Rotor Set for Edwards iXH1820 iH160 Dry Vacuum Pump Spare Parts (X3 & Y3)

Engineered to exact OEM specifications, this high-precision Edwards dry pump claw rotor pair is designed for the 3rd stage compression of iXH and iH series pumps. Manufactured from premium SS316L or heavy-duty ductile iron with custom anti-corrosion coatings, this set serves as an essential vacuum pump replacement spare part to restore peak ultimate pressure.

Quantity :

US $221.00

US $120.00 To via UPS Estimated Delivery on 3-14

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High-Precision Stage 3 X/Y Claw Rotor Set for Edwards Dry Vacuum Pumps

In demanding high-vacuum manufacturing processes—such as semiconductor etching, PECVD, flat panel display production, and solar cell fabrication—maintaining perfect rotor clearances is critical for vacuum performance. Our high-precision Edwards dry pump claw rotor set (X3 & Y3) is designed for seamless drop-in replacement during major pump overhauls and maintenance cycles.

Key Technical Highlights & Features:

5-Axis Precision Machining: Machined on advanced 5-axis CNC equipment to achieve strict dimensional tolerances within ±0.005mm to ±0.01mm, minimising gas back-flow and maximising pumping efficiency.
ISO 1940 Dynamic Balance:EachStage 3 X/Y rotor set is dynamically balanced to ISO 1940 G2.5 standards to ensure ultra-low vibration and minimal bearing stress at high operating speeds.
Corrosion-Resistant Options: Available in high-density ductile iron (GGG50) or 316L stainless steel, with optional PTFE/PFA coatings to withstand aggressive process gases.
Direct OEM Fit: Built as a direct-fit vacuum pump replacement spare part for Edwards iXH (iXH1820, iXH6050) and iH (iH160, iH80) series dry vacuum pumps.