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Model No: D37421000
Edwards iTIM E73/A1/T1 + Serial Tool Interface Module，D37421000
Condition: USED, AS-IS.
Delivery :
EXW,FCA,FOB,CIF
minimum order :
1
Stock Time :
3~7Day
Quantity :
US $370.00
US $120.00
To
via
UPS
Estimated Delivery on
3-14
iTIM E73/A1/T1 + Serial (Tool Interface Module with Serial Communication)，D37421000
The iTIM (Tool Interface Module) is a control and monitoring module designed by Edwards for the iH series dry vacuum pumping systems. The D37421000 model adds an RS232 serial interface to the E73/A1/T1 parallel interface, enabling remote control and status query via serial communication. It is ideal for integration with host tools, SCADA systems, or custom control software.
Key Features
- Parallel Interface Control – Supports start/stop, valve control, and process mode switching via E73, A1, and T1 parallel I/O interfaces.
- RS232 Serial Communication:
- Baud rate: 9600 bps
- Data bits: 8, Stop bits: 1, Parity: None
- Custom command/query protocol for remote monitoring and configuration
- Gate Valve Control – Configurable open/close logic with emergency shutdown support.
- Control Arbitration – Supports control handover between multiple modules (e.g., PDT and remote interface).
- Simulation Mode – Allows testing and training without affecting actual pump operation.
Compatible Equipment
Designed for Edwards iH series dry vacuum pumping systems (iH80, iH600, iH1000). Suitable for semiconductor, PECVD, LPCVD, plasma etch, and other process environments requiring remote monitoring and integration.
We ship globally. For accurate shipping costs, please provide your delivery address before we confirm your order.
Comprehensive score